Growth of polycrystalline and single-crystal CVD
2018-11-1 · We realized the doping of polycrystalline diamond films and (111) oriented homoepitaxial single crystal diamond layers with Ge by adding germane to the CH 4-H 2 reaction gas mixture in the course of the deposition process in the microwave plasma. The doped films demonstrated the bright photoluminescence of Ge-V color centers with ZPL at 602 nm wavelength at room temperature.
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